Numerical solution of the initial boundary value problems of radio-frequency capacitive coupled discharge.

dc.contributor.author	Badriev I.
dc.contributor.author	Zheltukhin V.
dc.contributor.author	Ju Chebakova V.
dc.date.accessioned	2018-04-05T07:09:58Z
dc.date.available	2018-04-05T07:09:58Z
dc.date.issued	2017
dc.identifier.issn	1742-6588
dc.identifier.uri	http://dspace.kpfu.ru/xmlui/handle/net/130098
dc.description.abstract	© Published under licence by IOP Publishing Ltd. We present the numerical method, which allow to calculation of the charged particles flow density in the areas with heavy gradients of charged particles density and changing of convection-diffusion non-steady equation coefficients for charged particles concentration finding by the solution of electrons balance initial boundary value problem.
dc.relation.ispartofseries	Journal of Physics: Conference Series
dc.title	Numerical solution of the initial boundary value problems of radio-frequency capacitive coupled discharge.
dc.type	Conference Paper
dc.relation.ispartofseries-issue	1
dc.relation.ispartofseries-volume	927
dc.collection	Публикации сотрудников КФУ
dc.source.id	SCOPUS17426588-2017-927-1-SID85037681324

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Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.