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Characterization of the Surface of Silver Ion-Implanted Silicon by Optical Reflectance

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dc.contributor.author Stepanov A.
dc.contributor.author Vorobev V.
dc.contributor.author Nuzhdin V.
dc.contributor.author Valeev V.
dc.contributor.author Osin Y.
dc.date.accessioned 2018-04-05T07:08:56Z
dc.date.available 2018-04-05T07:08:56Z
dc.date.issued 2017
dc.identifier.issn 0021-9037
dc.identifier.uri http://dspace.kpfu.ru/xmlui/handle/net/129425
dc.description.abstract © 2017, Springer Science+Business Media, LLC, part of Springer Nature. The optical reflection of the surface of silicon implanted with Ag + ions at low energy of 30 keV in a wide dosage range of 5.0·10 14 –1.5·10 17 ion/cm 2 was studied in parallel with electron microscopy observation of the samples. It was found that with increasing ion dose of irradiation, the reflection intensity in the UV range of the Si spectrum decreases monotonically due to amorphization and macrostructuring of Si near-surface layer. In the long-wavelength region of the reflection spectra, a selective band with a maximum near 830 nm is recorded due to the plasmon resonance of ion-synthesized Ag nanoparticles.
dc.relation.ispartofseries Journal of Applied Spectroscopy
dc.subject ion implantation
dc.subject optical reflectance
dc.subject plasmon resonance
dc.title Characterization of the Surface of Silver Ion-Implanted Silicon by Optical Reflectance
dc.type Article
dc.relation.ispartofseries-issue 5
dc.relation.ispartofseries-volume 84
dc.collection Публикации сотрудников КФУ
dc.relation.startpage 785
dc.source.id SCOPUS00219037-2017-84-5-SID85034086767


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  • Публикации сотрудников КФУ Scopus [24551]
    Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.

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