dc.contributor |
Казанский (Приволжский) федеральный университет |
|
dc.contributor.author |
Богданова М. А. |
ru_RU |
dc.contributor.author |
Лопаев Д.В. |
ru_RU |
dc.contributor.author |
Зырянов С.М. |
ru_RU |
dc.contributor.author |
Рахимова Т.В. |
ru_RU |
dc.contributor.author |
Волошин Д.Г. |
ru_RU |
dc.date.accessioned |
2018-01-11T08:38:37Z |
|
dc.date.available |
2018-01-11T08:38:37Z |
|
dc.date.issued |
2017 |
|
dc.identifier.uri |
http://dspace.kpfu.ru/xmlui/handle/net/117521 |
|
dc.description.abstract |
The possibility of the ion flux and energy virtual diagnostics at an rf-biased electrode in an asymmetric rf dual-frequency CCP discharge in Ar, N2 and Xe plasmas is considered. Ion energy distributions (IEDs) were calculated according to the semi-analytical model of the ion motion through the sheath including a set of externally measurable discharge parameters. Direct IED measurements were carried out via the Retarded Field Energy Analyzer (RFEA). The ion flux was measured by the pulsed self-bias method. |
ru_RU |
dc.relation.ispartofseries |
"ФИЗИКА НИЗКОТЕМПЕРАТУРНОЙ ПЛАЗМЫ" ФНТП-2017 |
ru_RU |
dc.subject |
- |
ru_RU |
dc.subject |
- |
en_US |
dc.title |
ПОТОК И ЭНЕРГЕТИЧЕСКОЕ РАСПРЕДЕЛЕНИЕ ИОНОВ НА ЭЛЕКТРОДЕ В ДВУХЧАСТОТНОМ ВЧЕ РАЗРЯДЕ |
ru_RU |
dc.title.alternative |
ION FLUX AND ENERGY DISTRIBUTION AT AN ELECTRODE IN AN RF DUAL-FREQUENCY CCP DISCHARGE |
en_US |
dc.type |
article |
|
dc.identifier.udk |
- |
|
dc.description.pages |
46-46 |
|