ПОТОК И ЭНЕРГЕТИЧЕСКОЕ РАСПРЕДЕЛЕНИЕ ИОНОВ НА ЭЛЕКТРОДЕ В ДВУХЧАСТОТНОМ ВЧЕ РАЗРЯДЕ

Abstract

The possibility of the ion flux and energy virtual diagnostics at an rf-biased electrode in an asymmetric rf dual-frequency CCP discharge in Ar, N2 and Xe plasmas is considered. Ion energy distributions (IEDs) were calculated according to the semi-analytical model of the ion motion through the sheath including a set of externally measurable discharge parameters. Direct IED measurements were carried out via the Retarded Field Energy Analyzer (RFEA). The ion flux was measured by the pulsed self-bias method.