Богданова М. А.; Лопаев Д.В.; Зырянов С.М.; Рахимова Т.В.; Волошин Д.Г.
(2017)
The possibility of the ion flux and energy virtual diagnostics at an rf-biased electrode in an asymmetric rf dual-frequency CCP discharge in Ar, N2 and Xe plasmas is considered. Ion energy distributions (IEDs) were calculated ...