Stepanov A.L.; Batalov R.I.; Bayazitov R.M.; Rogov A.M.
(2020)
© 2020 Elsevier Ltd The paper presents the results of Si surface modification created by implantation with Ag+ ions at energy of 30 keV, current density of 8 μA/cm2 for various doses from 6.0·1015 to 7.5·1016 ion/cm2 and ...