Batalov R.; Bayazitov R.; Faizrakhmanov I.; Khaibullin R.; Tagirov L.; Gumarov A.; Vdovin V.
(2020)
© 2019 Elsevier Ltd The doping of near-surface region of single crystalline p-type Si by Fe impurity under irradiation by the low-energy and high-current Xe+ ion beam is investigated. The recoil-atom implantation method ...