Lyadov N.M.; Gavrilova T.P.; Khantimerov S.M.; Bazarov V.V.; Suleimanov N.M.; Shustov V.A.; Nuzhdin V.I.; Yanilkin I.V.; Gumarov A.I.; Faizrakhmanov I.A.; Tagirov L.R.
(2020)
© 2020, Pleiades Publishing, Ltd. Abstract: Results are presented of a study of the morphology of germanium films nanostructured by ion implantation. Film samples were grown by magnetron sputtering in an ultrahigh-vacuum ...