Vorob’ev V.V.; Gumarov A.I.; Tagirov L.R.; Rogov A.M.; Nuzhdin V.I.; Valeev V.F.; Stepanov A.L.
(2020)
© 2020, Pleiades Publishing, Ltd. Abstract: We report on the results of analysis of the structure and chemical composition of the surface of c-Si single crystal substrates implanted with Cu+ ions with energy of 40 keV and ...