Stepanov A.; Vorobev V.; Nuzhdin V.; Valeev V.; Osin Y.
(2017)
© 2017, Springer Science+Business Media, LLC, part of Springer Nature. The optical reflection of the surface of silicon implanted with Ag + ions at low energy of 30 keV in a wide dosage range of 5.0·10 14 –1.5·10 17 ion/cm ...