Batalov R.; Valeev V.; Nuzhdin V.; Vorebev V.; Osin Y.; Lebedev D.; Bukharaev A.; Stepanov A.
(2015)
© 2015, Pleiades Publishing, Ltd. In this paper, a new technique is proposed for synthesis of porous silicon (PSi) layers with silver nanoparticles based on the method of low-energy high-dose metal ion implantation into ...