Mohammed W.M.; Gumarov A.I.; Vakhitov I.R.; Yanilkin I.V.; Nikitin S.I.; Tagirov L.R.; Yusupov R.V.
(2017)
A use of the four-probe resistance measurements as a tool for characterization of a quality of titanium nitride thin films deposited by the reactive dc magnetron sputtering will be discussed in the report. Few series of ~ ...